Bronkhorst EL-FLOW Base 2014 Bedienungsanleitung PDF herunterladen (Seite 3)

BRONKHORST HIGH-TECH

TABLE OF CONTENTS

1 General Product Information ........................................................................................................... 4

1.1 Introduction ....................................................................................................................................................... 4

1.2 Intended Use ...................................................................................................................................................... 4

1.3 Symbols .............................................................................................................................................................. 4

1.4 Product Support References .............................................................................................................................. 4

1.5 Warranty ............................................................................................................................................................ 5

1.6 Product Description ........................................................................................................................................... 5

1.7 Operating Principles ........................................................................................................................................... 8

1.8 Maintenance ...................................................................................................................................................... 9

2 Installation Instructions ................................................................................................................. 10

2.1 Introduction ..................................................................................................................................................... 10

2.2 Unpacking and inspection ................................................................................................................................ 10

2.3 Rated pressure test inspection ........................................................................................................................ 10

2.4 Instrument mounting ....................................................................................................................................... 10

2.5 Fluidic connections .......................................................................................................................................... 11

2.6 In-line filter usage ............................................................................................................................................ 11

2.7 Piping requirements ........................................................................................................................................ 11

2.8 Electrical connections ...................................................................................................................................... 12

2.9 Power and warm-up ........................................................................................................................................ 12

2.10 Pressure supply / Start-up ............................................................................................................................... 12

2.11 System purging ................................................................................................................................................ 13

2.12 Zeroing ............................................................................................................................................................. 13

3 Basic Operation ............................................................................................................................. 14

3.1 General ............................................................................................................................................................ 14

3.2 Analog operation ............................................................................................................................................. 14

3.3 Basic RS232 Flowbus operation ....................................................................................................................... 14

3.4 Modbus RS485 operation ................................................................................................................................ 15

3.5 Push-button operation .................................................................................................................................... 22

3.6 LED indications ................................................................................................................................................. 22

3.7 Basic Parameters and Properties ..................................................................................................................... 23

4 Advanced Operation ..................................................................................................................... 25

4.1 Reading and Changing Instrument Parameters ............................................................................................... 25

4.2 Using other gasses than specified .................................................................................................................... 30

5 Troubleshooting ............................................................................................................................ 31

5.1 General ............................................................................................................................................................ 31

5.2 LED indications ................................................................................................................................................. 31

5.3 Troubleshooting summary general .................................................................................................................. 31

6 Removal and Return Instructions ................................................................................................... 33

7 Service .......................................................................................................................................... 34

9.17.061 EL-FLOW Base Series Mass Flow Controllers Page 3

1 2 3 4 5 6 7 8 ... 33 34

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